Table 1 Young’s modulus of Copper

From: Modeling the copper microstructure and elastic anisotropy and studying its impact on reliability in nanoscale interconnects

Material	Young’s modulus [GPa]
	E₁	E₂	E₃
Isotropic	120	120	120
Orientation 1 (100)	66.7	66.7	66.7
Orientation 2 (110)	66.7	130.3	130.3
Orientation 3 (111)	130.3	191.1	130.3
Orientation 4 (311)	130.3	96.2	130.3
Orientation 5 (511)	130.3	77.2	130.3
Orientation 6 (221)	158.3	158.3	158.3
Orientation 7 (321)	130.3	130.3	191.1
Orientation 8 (310)	130.3	80.9	130.3
Orientation 9 (210)	158.3	97.0	158.3
Orientation 10 (211)	130.3	130.3	130.3
Orientation 11 (331)	130.3	143.6	130.3
Orientation 12 (7 5 13)	66.7	122.2	191.1
Orientation 13 (11 1 11)	130.3	131.3	130.3

Back to article page